Thin film materials technology:
Wasa, Kiyotaka.
Thin film materials technology: sputtering of compound materials Kiyotaka Wasa; Makoto Kitabatake and Hideaki Adachi - New York : Springer-Verlag, 2004. - xiv, 518 p.
9780815514831
Cathode sputtering.
Thin films.
Sputtering phenomena.
621.38152 W269T
Thin film materials technology: sputtering of compound materials Kiyotaka Wasa; Makoto Kitabatake and Hideaki Adachi - New York : Springer-Verlag, 2004. - xiv, 518 p.
9780815514831
Cathode sputtering.
Thin films.
Sputtering phenomena.
621.38152 W269T