Thin film materials technology:

Wasa, Kiyotaka.

Thin film materials technology: sputtering of compound materials Kiyotaka Wasa; Makoto Kitabatake and Hideaki Adachi - New York : Springer-Verlag, 2004. - xiv, 518 p.

9780815514831


Cathode sputtering.
Thin films.
Sputtering phenomena.

621.38152 W269T



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