Silicon processing for the VLSI era:
Wolf, Stanley.
Silicon processing for the VLSI era: Volume-I Process Technology Stanley Wolf, Richard N. Tauber. - 2nd ed. - Sunset Beach, Calif. : Lattice Press, 2000. - xxxvi, 890p. ill. ; 25 cm.
Includes bibliographies and indexes.
v. 1. Process technology
0961672161 (v. 1) = EECS-reference book collection
2003283097
Semiconductors--Etching.
Integrated circuits--Very large scale integration.
Silicon.
TK7874 / .W635 2002
621.38173 W831S2
Silicon processing for the VLSI era: Volume-I Process Technology Stanley Wolf, Richard N. Tauber. - 2nd ed. - Sunset Beach, Calif. : Lattice Press, 2000. - xxxvi, 890p. ill. ; 25 cm.
Includes bibliographies and indexes.
v. 1. Process technology
0961672161 (v. 1) = EECS-reference book collection
2003283097
Semiconductors--Etching.
Integrated circuits--Very large scale integration.
Silicon.
TK7874 / .W635 2002
621.38173 W831S2