Fundamentals of microfabrication / (Record no. 8445)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 01282cam a2200325 a 4500 |
| 001 - CONTROL NUMBER | |
| control field | 1636710 |
| 005 - DATE AND TIME OF LATEST TRANSACTION | |
| control field | 20180529101348.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 960830s1997 fluaf b 001 0 eng |
| 035 ## - SYSTEM CONTROL NUMBER | |
| -- | (DLC) 96043344 |
| 010 ## - LIBRARY OF CONGRESS CONTROL NUMBER | |
| LC control number | 96043344 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 0849394511 (acidfree paper) |
| 040 ## - CATALOGING SOURCE | |
| Original cataloging agency | DLC |
| Transcribing agency | DLC |
| Modifying agency | DLC |
| 050 00 - LIBRARY OF CONGRESS CALL NUMBER | |
| Classification number | TK7836 |
| Item number | .M33 1997 |
| 082 00 - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 621.3815/2 |
| Edition number | 20 |
| 100 1# - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Madou, Marc J. |
| 9 (RLIN) | 22783 |
| 245 10 - TITLE STATEMENT | |
| Title | Fundamentals of microfabrication / |
| Statement of responsibility, etc | Marc Madou. |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
| Place of publication, distribution, etc | Boca Raton, Fla. : |
| Name of publisher, distributor, etc | CRC Press, |
| Date of publication, distribution, etc | c1997. |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | 589 p., [22] p. of plates : |
| Other physical details | ill. (some col.) ; |
| Dimensions | 29 cm. |
| 504 ## - BIBLIOGRAPHY, ETC. NOTE | |
| Bibliography, etc | Includes bibliographical references (p. 565-569) and index. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name as entry element | Microelectronics. |
| 9 (RLIN) | 22784 |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name as entry element | Integrated circuits |
| General subdivision | Design and construction. |
| 9 (RLIN) | 22785 |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name as entry element | Microelectromechanical systems |
| General subdivision | Design and construction. |
| 9 (RLIN) | 22786 |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name as entry element | Machining. |
| 9 (RLIN) | 22787 |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name as entry element | Microelectronic packaging. |
| 9 (RLIN) | 22788 |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name as entry element | Lasers |
| General subdivision | Industrial applications. |
| 9 (RLIN) | 22789 |
| 906 ## - LOCAL DATA ELEMENT F, LDF (RLIN) | |
| a | 7 |
| b | cbc |
| c | orignew |
| d | 1 |
| e | ocip |
| f | 19 |
| g | y-gencatlg |
| 920 ## - | |
| -- | ** LC HAS REQ'D # OF SHELF COPIES ** |
| 991 ## - | |
| -- | c-GenColl |
| -- | TK7836 |
| -- | .M33 1997 |
| -- | Copy 1 |
| -- | BOOKS |
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