Entry Topical Term

Number of records used in: 1

001 - CONTROL NUMBER

• control field: 22786

003 - CONTROL NUMBER IDENTIFIER

• control field: OSt

005 - DATE AND TIME OF LATEST TRANSACTION

• control field: 20180529101347.0

008 - FIXED-LENGTH DATA ELEMENTS

• fixed length control field: 180529|| aca||aabn | a|a d

040 ## - CATALOGING SOURCE

• Original cataloging agency: OSt
• Transcribing agency: OSt

150 ## - HEADING--TOPICAL TERM

• Topical term or geographic name as entry element: Microelectromechanical systems
• General subdivision: Design and construction.

670 ## - SOURCE DATA FOUND

• Source citation: Work cat.: (OSt): Madou, Marc J. 22783, Fundamentals of microfabrication /, c1997.