TY  - BOOK
AU  - Dobkin,Daniel M.
AU  - Zuraw,Michael K.
TI  - Principles of chemical vapor deposition: what's going on inside the reactor
SN  - 1402012489
U1  - 671.735 P935 
PY  - 2003///
CY  - Netherland
PB  - Kluwer Academic Publishers
KW  - Refractory coating
KW  - Vapor-plating
KW  - Machinery
KW  - Chemical engineering
ER  -