TY  - BOOK
AU  - Ohring,Milton
TI  - Materials science of thin films: deposition and structure
SN  - 0125249756
U1  - 621.38152 OH6M2 
PY  - 2002///
CY  - San Diego
PB  - Academic Press
KW  - Thin films
KW  - Materials science
KW  - Vacuum science
KW  - Epitaxy
ER  -