TY  - BOOK
AU  - Wasa,Kiyotaka
AU  - Kitabatake,Makoto
AU  - Adachi,Hideaki
TI  - Thin film materials technology: sputtering of compound materials
SN  - 9780815514831
U1  - 621.38152 W269T 
PY  - 2004///
CY  - New York
PB  - Springer-Verlag
KW  - Cathode sputtering
KW  - Thin films
KW  - Sputtering phenomena
ER  -