TY  - BOOK
AU  - Wolf,Stanley
AU  - Tauber,Richard N.
TI  - Silicon processing for the VLSI era: : Volume-I Process Technology
SN  - 0961672161 (v. 1)
AV  - TK7874 .W635 2002
U1  - 621.38173 W831S2 23
PY  - 2000///
CY  - Sunset Beach, Calif.
PB  - Lattice Press
KW  - Semiconductors
KW  - Etching
KW  - Integrated circuits
KW  - Very large scale integration
KW  - Silicon
N1  - Includes bibliographies and indexes; v. 1. Process technology
ER  -