TY  - BOOK
AU  - Campbell,Stephen A.
TI  - The science and engineering of microelectronic fabrication
SN  - 0195105087 (cl : acidfree paper)
AV  - TK7871.85 .C25 1996
U1  - 621.3815/2 20
PY  - 1996///
CY  - New York
PB  - Oxford University Press
KW  - Semiconductors
KW  - Design and construction
N1  - Includes bibliographical references and index
UR  - http://www.loc.gov/catdir/enhancements/fy0640/95035577-d.html
UR  - http://www.loc.gov/catdir/enhancements/fy0640/95035577-t.html
ER  -