TY  - BOOK
AU  - Senturia,Stephen D.
TI  - Microsystem design 
SN  - 9788181285461 (Pbk)
AV  - TK7875 .S46 2000
U1  - 621.3 Se59M 23
PY  - 2015///
CY  - New Delhi
PB  - Springer India Pvt. Ltd.
KW  - Microelectromechanical systems
KW  - Design and construction
KW  - System design
KW  - Microelectronics
N1  - Includes bibliographical references (p. [665]-676) and index
UR  - http://www.loc.gov/catdir/enhancements/fy0821/00048768-d.html
UR  - http://www.loc.gov/catdir/enhancements/fy0821/00048768-t.html
ER  -