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The science and engineering of microelectronic fabrication / Stephen A. Campbell.

By: Series: Oxford series in electrical engineeringPublication details: New York : Oxford University Press, 1996.Description: xv, 536 p. : ill. ; 25 cmISBN:
  • 0195105087 (cl : acidfree paper)
Subject(s): DDC classification:
  • 621.3815/2 20
LOC classification:
  • TK7871.85 .C25 1996
Online resources:
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Includes bibliographical references and index.

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