000 00705nam a2200217Ia 4500
003 OSt
005 20160830115820.0
008 130919s9999 xx 000 0 und d
020 _a1402012489
040 _aIISER Bhopal
_cTBS
082 0 0 _a671.735 P935
100 1 _aDobkin, Daniel M.
_92788
245 1 0 _aPrinciples of chemical vapor deposition:
_bwhat's going on inside the reactor
_cDaniel M. Dobkin and Michael K. Zuraw.
260 _aNetherland :
_bKluwer Academic Publishers,
_c2003.
650 0 _aRefractory coating.
_914430
650 0 _aVapor-plating.
_914431
650 0 _aMachinery.
_914432
650 0 _aChemical engineering.
_914433
700 1 _aZuraw, Michael K.
_914434
942 _cREF
_2ddc
999 _c1033
_d1033