000 00651nam a2200229Ia 4500
003 OSt
005 20160830130146.0
008 130919s9999 xx 000 0 und d
020 _a0125249756
040 _aIISER Bhopal
_cIBA
082 0 0 _a621.38152 OH6M2
100 1 _aOhring, Milton.
_92837
245 1 0 _aMaterials science of thin films:
_bdeposition and structure
_cMilton Ohring.
250 _a2nd ed.
260 _aSan Diego :
_bAcademic Press,
_c2002.
300 _axiii, 253 p.
650 0 _aThin films.
_914468
650 0 _aMaterials science.
_914469
650 0 _aVacuum science.
_914470
650 0 _aEpitaxy.
_914471
942 _cREF
_2ddc
999 _c1063
_d1063