000 00772nam a2200241Ia 4500
003 OSt
005 20160830174350.0
008 130919s9999 xx 000 0 und d
020 _a9781402075438
040 _aIISER Bhopal
_cLBD
082 0 0 _a621.38152P
100 1 _aBarnat, Edward V.
_92866
245 1 0 _aPulsed and pulsed bias sputtering principles and applications
_cEdward V. Barnat and Toh-Ming Lu.
260 _aMassachusetts :
_bKluwer Academic Publishers,
_c2003.
300 _ax, 155 p.
650 0 _aOptical materials.
_914567
650 0 _aThin films.
_914568
650 0 _aCathode sputtering-Plating process.
_914569
650 0 _aPolymers.
_914570
650 0 _aPhysical organic chemistry.
_914571
700 1 _aLu, Toh-Ming.
_914572
942 _cREF
_2ddc
999 _c1131
_d1131