000 | 00729nam a2200229Ia 4500 | ||
---|---|---|---|
003 | OSt | ||
005 | 20160820123034.0 | ||
008 | 130919s9999 xx 000 0 und d | ||
020 | _a9780815514831 | ||
040 |
_aIISER Bhopal _cLBD |
||
082 | 0 | 0 | _a621.38152 W269T |
100 | 1 |
_aWasa, Kiyotaka. _92386 |
|
245 | 1 | 0 |
_aThin film materials technology: _bsputtering of compound materials _cKiyotaka Wasa; Makoto Kitabatake and Hideaki Adachi |
260 |
_aNew York : _bSpringer-Verlag, _c2004. |
||
300 | _axiv, 518 p. | ||
650 |
_aCathode sputtering. _913765 |
||
650 | 0 |
_aThin films. _913766 |
|
650 | 0 |
_aSputtering phenomena. _913767 |
|
700 | 1 |
_aKitabatake, Makoto. _913768 |
|
700 | 1 |
_aAdachi, Hideaki. _913769 |
|
942 |
_cREF _2ddc |
||
999 |
_c568 _d568 |