000 00729nam a2200229Ia 4500
003 OSt
005 20160820123034.0
008 130919s9999 xx 000 0 und d
020 _a9780815514831
040 _aIISER Bhopal
_cLBD
082 0 0 _a621.38152 W269T
100 1 _aWasa, Kiyotaka.
_92386
245 1 0 _aThin film materials technology:
_bsputtering of compound materials
_cKiyotaka Wasa; Makoto Kitabatake and Hideaki Adachi
260 _aNew York :
_bSpringer-Verlag,
_c2004.
300 _axiv, 518 p.
650 _aCathode sputtering.
_913765
650 0 _aThin films.
_913766
650 0 _aSputtering phenomena.
_913767
700 1 _aKitabatake, Makoto.
_913768
700 1 _aAdachi, Hideaki.
_913769
942 _cREF
_2ddc
999 _c568
_d568