| 000 | 01239cam a2200337 a 4500 | ||
|---|---|---|---|
| 001 | 12646444 | ||
| 003 | OSt | ||
| 005 | 20180817095632.0 | ||
| 008 | 020116s2002 njua b 101 0 eng | ||
| 010 | _a 2002276015 | ||
| 020 | _a0201444941 | ||
| 020 | _a9780201444940 (Pbk) | ||
| 040 |
_aDLC _cIISER Bhopal _dDLC |
||
| 050 | 0 | 0 |
_aTK7874 _b.J33 2002 |
| 082 | 0 | 0 |
_a621.395 J17I2 _223 |
| 100 | 1 |
_aJaeger, Richard C. _922768 |
|
| 222 | _aEECS-reference book collection | ||
| 245 | 1 | 0 |
_aIntroduction to microelectronic fabrication _cRichard C. Jaeger. |
| 250 | _a2nd ed. | ||
| 260 |
_aUpper Saddle River, N.J. : _bPrentice Hall, _cc2002. |
||
| 300 |
_axiv, 316 p. : _bill. ; _c24 cm. |
||
| 490 | 1 |
_aModular series on solid state devices ; _vv. 5 |
|
| 504 | _aIncludes bibliographical references and index. | ||
| 650 | 0 |
_aIntegrated circuits _xVery large scale integration _xDesign and construction _vTextbooks. _922769 |
|
| 650 | 0 |
_aMicroelectronic _923504 |
|
| 650 | 0 |
_aFabrication _923505 |
|
| 830 | 0 |
_aModular series on solid state devices (Upper Saddle River, N.J.) ; _vv. 5. _922770 |
|
| 906 |
_a7 _bcbc _corigcop _d2 _encip _f20 _gy-gencatlg |
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| 942 |
_2ddc _cBK |
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| 999 |
_c8439 _d8439 |
||