| 000 | 01282cam a2200325 a 4500 | ||
|---|---|---|---|
| 001 | 1636710 | ||
| 005 | 20180529101348.0 | ||
| 008 | 960830s1997 fluaf b 001 0 eng | ||
| 035 | _9(DLC) 96043344 | ||
| 906 |
_a7 _bcbc _corignew _d1 _eocip _f19 _gy-gencatlg |
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| 010 | _a 96043344 | ||
| 020 | _a0849394511 (acidfree paper) | ||
| 040 |
_aDLC _cDLC _dDLC |
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| 050 | 0 | 0 |
_aTK7836 _b.M33 1997 |
| 082 | 0 | 0 |
_a621.3815/2 _220 |
| 100 | 1 |
_aMadou, Marc J. _922783 |
|
| 245 | 1 | 0 |
_aFundamentals of microfabrication / _cMarc Madou. |
| 260 |
_aBoca Raton, Fla. : _bCRC Press, _cc1997. |
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| 300 |
_a589 p., [22] p. of plates : _bill. (some col.) ; _c29 cm. |
||
| 504 | _aIncludes bibliographical references (p. 565-569) and index. | ||
| 650 | 0 |
_aMicroelectronics. _922784 |
|
| 650 | 0 |
_aIntegrated circuits _xDesign and construction. _922785 |
|
| 650 | 0 |
_aMicroelectromechanical systems _xDesign and construction. _922786 |
|
| 650 | 0 |
_aMachining. _922787 |
|
| 650 | 0 |
_aMicroelectronic packaging. _922788 |
|
| 650 | 0 |
_aLasers _xIndustrial applications. _922789 |
|
| 920 | _a** LC HAS REQ'D # OF SHELF COPIES ** | ||
| 991 |
_bc-GenColl _hTK7836 _i.M33 1997 _tCopy 1 _wBOOKS |
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| 999 |
_c8445 _d8445 |
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