| 000 | 01366cam a22003254a 4500 | ||
|---|---|---|---|
| 001 | 12181154 | ||
| 003 | OSt | ||
| 005 | 20190124155942.0 | ||
| 008 | 000921s2001 maua b 001 0 eng | ||
| 010 | _a 00048768 | ||
| 020 | _a9788181285461 (Pbk) | ||
| 040 |
_aDLC _cIISER Bhopal _dDLC |
||
| 042 | _apcc | ||
| 050 | 0 | 0 |
_aTK7875 _b.S46 2000 |
| 082 | 0 | 0 |
_a621.3 Se59M _223 |
| 100 | 1 |
_aSenturia, Stephen D. _924485 |
|
| 222 | _aEECS-rreference book collection | ||
| 245 | 1 | 0 |
_aMicrosystem design _cStephen D. Senturia. |
| 260 |
_aNew Delhi : _bSpringer India Pvt. Ltd., _c2015. |
||
| 300 |
_axxvi, 689 p. : _bill. ; _c24 cm. |
||
| 504 | _aIncludes bibliographical references (p. [665]-676) and index. | ||
| 650 | 0 |
_aMicroelectromechanical systems _xDesign and construction. _924486 |
|
| 650 | 0 |
_aSystem design. _924487 |
|
| 650 | 0 |
_aMicroelectronics. _924488 |
|
| 856 | 4 | 2 |
_3Publisher description _uhttp://www.loc.gov/catdir/enhancements/fy0821/00048768-d.html |
| 856 | 4 | 1 |
_3Table of contents only _uhttp://www.loc.gov/catdir/enhancements/fy0821/00048768-t.html |
| 906 |
_a7 _bcbc _corignew _d1 _eocip _f20 _gy-gencatlg |
||
| 942 |
_2ddc _cBK |
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| 999 |
_c8798 _d8798 |
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